Custom Seals and Special Orders
At Ferrotec, we're committed to providing solutions that make your products work better, more precisely, and more reliably. When the challenges of your application exceed the specifications of our standard products, we can work with you to engineer a customized solution specifically suited to your unique application challenges.
From simple modifications of our standard products to custom-engineered precision-motion assemblies for new applications, we specialize in engineering solutions.
Many feedthrough parameters can be modified or customized to ensure that the final product matches your application. Some common customized features include:
Custom Design Examples
With over thirty years of experience developing and manufacturing precision sealing solutions for our customers, Ferrotec has developed custom solutions for many of the world's most demanding applications. Here are some common examples of custom engineered feedthroughs and sealing sub-systems that we have developed.
Ferrotec offers extremely compact seals with small seal envelopes. These are sometimes the only option in the case of retrofits where there is limited axial or radial space available. In new designs they are often beneficial to the overall system layout.
High-speed, large diameter hollow shaft feedthroughs
High speed, large diameter hollow shaft feedthroughs are ideal for optical coating applications, e.g. fiber optic filter manufacturing. These feedthroughs are configured with a double Ferrofluidic seal to enable static access to the rear of the seal. Drive is supplied via a toothed belt through the side of the housing or an integral brushless motor within the feedthrough housing. The product can then be accurately observed or measured through the large diameter hollow shaft without the difficulties associated with a rotating window. Seals with an 8" internal diameter can be used at speeds up to 1,000 rpm.
Ferrotec offers multi-axial feedthroughs for wafer handling applications. These offer extremely high repeatability with zero backlash. Linear motion is often incorporated as is cantilevered bearing configuration to optimize for UHV (Ultra High Vacuum) applications. Unlike magnetic couplings, the feedthroughs employ a continuous shaft per axis to transmit torque to the load, so torsional stiffness is maximized, allowing for the highest torque transmission of any UHV wafer-handling rotary seal technology.
Rotary linear feedthroughs integrate a Ferrofluidic rotary seal with an edge-welded metal bellows linear seal. They use pre-loaded angular contact rotary bearings and sleeve or ball-type linear bearings. Such feedthroughs are ideal for wafer handling and aligning applications where precise indexing and translation are involved.
High-precision spindle design
Ferrofluidic spindles can be engineered to rotate with as little as 0.0001" (0.005 mm) of run-out. These products are ideal for high precision wafer handling/aligning applications and wafer/substrate rotation applications where wobble requirements are very stringent. Axial, radial and torsional spindle stiffness are achieved by custom engineering the bearing and shaft designs.
In-line drive motorized feedthroughs
An in-line motorized feedthrough is compact in comparison to an offset or shaft-coupled drive. Ferrofluidic in-line motorized feedthroughs feature a brushless servomotor and matching amplifier with power supply and sinusoidal commutation. Application appropriate feedback devices and command loops are incorporated. As the feedthrough has the motor fully integrated around the shaft rather than coupled to it, it provides optimum drive-to-load torque efficiency over the life of the product. Direct drive feedthroughs are available with either solid or hollow shafts.
Rotary gas unions
Ferrofluidic rotary gas unions offer manufacturers of Chemical Vapor Deposition (CVD) and other deposition systems an efficient and flexible method of introducing gases into a process. A static gas feed runs into the rotating shaft which supports the wafer. This ensures that the gas outlet is in the center of the wafer, resulting in uniform coating characteristics.
Reactive gas seal
Reactive gas seals for applications such as MOCVD use an inert fluorocarbon based fluid. They feature a cantilevered seal design to protect the bearings from process gases. Special materials are used in the seal construction. Inert gas purges or protective plating can also be added to prevent corrosive attack of seal components.
Ferrotec offers a range of retrofit feedthroughs that we've already designed for many vacuum systems supplied by leading semiconductor OEMs. If your part isn't in our existing library of retrofit designs, we can design and optimize a retrofit seal to replace your current part with a Ferrofluidic seal.
Using a Standard Feedthrough as a Template
Our standard designs are often used as a template. While your requirements may almost fit one of our standard parts, our standard part may not be exactly what you need. Not all standard applications look the same, but it's usually not difficult for us to make modifications to a standard Ferrotec design in order to meet your requirements. Common modifications include shaft length and mounting hole changes.
To modify a standard feedthrough, start by identifying the standard feedthrough that you want to base the design on. Once you have selected the correct part, contact your Ferrotec representative (either directly or using the form provided on the Ordering Information page), and we can work with you to specify the necessary changes.
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If you have questions about pricing and availability, need more information about Ferrotec's rotary feedthroughs, or if you have other Ferrofluidic seal requirements, you can submit your request using the form below or contact your Ferrotec representative directly »
Special Orders, Modifications, and Customized Solutions for Unique Applications