Vacuum Rotary Feedthrough

Ferrotec is the world’s leading provider of vacuum rotary feedthroughs. We offer a broad range of vacuum rotary feedthroughs and Ferrofluidic® seals ranging from standard sizes and configurations to custom seals that have been designed specifically to meet demanding application requirements.

  • Standard Feedthroughs — seals that fit most common applications
  • Modified Standard Feedthroughs — add unique features for your requirements
  • Retrofits — re-engineered seal subcomponents for classic equipment
  • Custom Designs — solve your unique motion seal application
  • Subsystem Assemblies — turnkey supply of complete equipment subsystems
  • Repairs — expert feedthrough repair services

Select a Product Matching Your Requirements

Click the graphic that best represents the type of feedthrough or seal you’re looking for. A text description of each product will display if you simply roll your mouse over the graphic.

Select Imperial, metric, or both

InchesMetricBoth
Shaft Type
Mount Type
Environment
Temperature
Appearance Model Number Part Number Shaft Type Shaft Dimension Mounting Type Fluid
Feedthrough Model SS-188-SLES (part number 103073) image103073Solid0.1875inMini FlangeStandard
Feedthrough Model SS-188-SLAA (part number 103971) image103971Solid0.1875inNose (threaded)Standard
Feedthrough Model SS-188-SLES (part number 103075) image103075Solid0.1875inMini FlangeStandard
Feedthrough Model SS-188-SLES (part number 103074) image103074Solid0.1875inMini FlangeStandard
Feedthrough Model USS-250-SLBE (part number 150360) image150360Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model USS-250-SLCB (part number 134292) image134292Solid0.25inConFlat FlangeStandard
Feedthrough Model SS-250-SLBE (part number 107519) image107519Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLBD (part number 103236) image103236Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLAB (part number 103978) image103978Solid0.25inNose (threaded)Standard
Feedthrough Model SS-250-SLCA (part number 103915) image103915Solid0.25inConFlat FlangeStandard
Feedthrough Model USS-250-SLCA (part number 134293) image134293Solid0.25inConFlat FlangeStandard
Feedthrough Model USS-250-SLKB (part number 134091) image134091Solid0.25inKF FlangeStandard
Feedthrough Model SS-250-SLBE (part number 103982) image103982Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLBE (part number 103237) image103237Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLCB (part number 103532) image103532Solid0.25inConFlat FlangeStandard
Feedthrough Model USS-375-SLCB (part number 134294) image134294Solid0.375inConFlat FlangeStandard
Feedthrough Model SS-375-SLKC  (part number 121062) image121062Solid0.375inKF FlangeStandard
Feedthrough Model SS-375-SLBE (part number 103990) image103990Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model USS-375-SLKB (part number 134090) image134090Solid0.375inKF FlangeStandard
Feedthrough Model SS-375-CFCB (part number 121060) image121060Solid0.375inConFlat FlangeReactive Gas
Feedthrough Model SS-375-SLES (part number 114892) image114892Solid0.375inCustomStandard
Feedthrough Model SS-375-SLBE (part number 132910) image132910Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model SS-375-SLCB (part number 103154) image103154Solid0.375inConFlat FlangeStandard
Feedthrough Model USS-375-SLBE (part number 150359) image150359Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model USS-375-SFKB (part number 134089) image134089Solid0.375inKF FlangeReactive Gas
Feedthrough Model SS-375-SLBF (part number 103991) image103991Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model SS-375-SLCBW (part number 103912) image103912Solid0.375inConFlat FlangeStandard
Feedthrough Model HS-500-SLFAC (part number 103358) image103358Hollow0.5inFerro FlangeStandard
Feedthrough Model HS-500-SLXSC (part number 132405) image132405Hollow0.5inCartridge SealStandard
Feedthrough Model SS-500-SLCB (part number 103909) image103909Solid0.5inConFlat FlangeStandard
Feedthrough Model SS-500-SLFAW  (part number 103182) image103182Solid0.5inFerro FlangeStandard
Feedthrough Model SS-500-SLFA (part number 103244) image103244Solid0.5inFerro FlangeStandard
Feedthrough Model HS-500-SLFACW (part number 105395) image105395Hollow0.5inFerro FlangeStandard
Feedthrough Model SS-500-SLAE (part number 103191) image103191Solid0.5inNose (threaded)Standard
Feedthrough Model SS-500-SLAEW (part number 103204) image103204Solid0.5inNose (threaded)Standard
Feedthrough Model SS-750-SLFAW (part number 121101) image121101Solid0.75inFerro FlangeStandard
Feedthrough Model SS-750-SLFA (part number 103246) image103246Solid0.75inFerro FlangeStandard
Feedthrough Model HS-750-CFFBWPS  (part number 107426) image107426Hollow0.75inFerro FlangeReactive Gas
Feedthrough Model SS-750-SLAE (part number 103193) image103193Solid0.75inNose (threaded)Standard
Feedthrough Model CM-750-CLFSWC  (part number 132121) image132121Hollow0.75inCompliant MountStandard
Feedthrough Model SS-750-SLAEW (part number 103206) image103206Solid0.75inNose (threaded)Standard
Feedthrough Model HD-750-SLFFW (part number 103904) image103904Heavy Duty0.75inFerro FlangeStandard
Feedthrough Model SS-1000-SLFAW  (part number 121159) image121159Solid1inFerro FlangeStandard
Feedthrough Model HS-1000-SLFBCW (part number 105396) image105396Hollow1inFerro FlangeStandard
Feedthrough Model HS-1000-SLXSC (part number 103319) image103319Hollow1inCartridge SealStandard
Feedthrough Model CM-1000-CLFSWC  (part number 132122) image132122Hollow1inCompliant MountStandard
Feedthrough Model HS-1000-CFFBWP  (part number 107423) image107423Hollow1inFerro FlangeReactive Gas
Feedthrough Model SS-1000-SLFA  (part number 121152) image121152Solid1inFerro FlangeStandard
Feedthrough Model HS-1000-SLFBC (part number 103359) image103359Hollow1inFerro FlangeStandard
Feedthrough Model SS-1000-CFCDW  (part number 121153) image121153Solid1inConFlat FlangeReactive Gas
Feedthrough Model HS-1250-CFFBWPS  (part number 107427) image107427Hollow1.25inFerro FlangeReactive Gas
Feedthrough Model HS-1500-CFFBWP  (part number 107424) image107424Hollow1.5inFerro FlangeReactive Gas
Feedthrough Model HS-1500-SLFBCW (part number 103354) image103354Hollow1.5inFerro FlangeStandard
Feedthrough Model CM-1500-CLFSWC  (part number 132123) image132123Hollow1.5inCompliant MountStandard
Feedthrough Model HS-1500-SLXSC (part number 103320) image103320Hollow1.5inCartridge SealStandard
Feedthrough Model HS-1500-CFFCWPS (part number 107428) image107428Hollow1.5inFerro FlangeReactive Gas
Feedthrough Model HS-1500-SLFBC (part number 103360) image103360Hollow1.5inFerro FlangeStandard
Feedthrough Model HS-1750-CFFBWP  (part number 107425) image107425Hollow1.75inFerro FlangeReactive Gas
Feedthrough Model HS-2000-SLFBCW (part number 103921) image103921Hollow2inFerro FlangeStandard
Feedthrough Model HS-2000-SLXSC (part number 103321) image103321Hollow2inCartridge SealStandard
Feedthrough Model CM-2000-CLFSWC  (part number 122151) image122151Hollow2inCompliant MountStandard
Feedthrough Model HS-2000-SLFBC (part number 103361) image103361Hollow2inFerro FlangeStandard
Feedthrough Model CM-2500-CLFSWC  (part number 132124) image132124Hollow2.5inCompliant MountStandard
Feedthrough Model CM-3000-CLFSWC  (part number 132125) image132125Hollow3inCompliant MountStandard
Feedthrough Model HS-3000-SLFBCW (part number 133760) image133760Hollow3inFerro FlangeStandard
Feedthrough Model HS-3000-SLXSC (part number 133759) image133759Hollow3inCartridge SealStandard
Feedthrough Model HS-3000-SLFEC (part number 133218) image133218Hollow3inFerro FlangeStandard
Feedthrough Model SSL-005-NN (part number 133601) image133601Solid5mmNose (threaded)Standard
Feedthrough Model SNL-005-NN (part number 133598) image133598Solid5mmNut Mounted (threaded body)Standard
Feedthrough Model SFL-005-NN (part number 133566) image133566Solid5mmFerro FlangeStandard
Feedthrough Model SFL-006-NN (part number 133567) image133567Solid6mmFerro FlangeStandard
Feedthrough Model SSL-006-NN (part number 133602) image133602Solid6mmNose (threaded)Standard
Feedthrough Model SFL-006-WN (part number 133572) image133572Solid6mmFerro FlangeStandard
Feedthrough Model SNL-006-NN (part number 133029) image133029Solid6mmNut Mounted (threaded body)Standard
Feedthrough Model SSL-010-NN (part number 133603) image133603Solid10mmNose (threaded)Standard
Feedthrough Model HFL-010-CN (part number 133606) image133606Hollow10mmFerro FlangeStandard
Feedthrough Model HFL-010-NN (part number 133605) image133605Hollow10mmFerro FlangeStandard
Feedthrough Model HTL-010-NN (part number 133554) image133554Hollow10mmCartridge SealStandard
Feedthrough Model SFL-010-NN (part number 131383) image131383Solid10mmFerro FlangeStandard
Feedthrough Model SNL-010-NN (part number 121503) image121503Solid10mmNut Mounted (threaded body)Standard
Feedthrough Model HFL-010-MN (part number 133588) image133588Hollow10mmFerro FlangeStandard
Feedthrough Model HTL-010-CN (part number 133558) image133558Hollow10mmCartridge SealStandard
Feedthrough Model HFL-010-WN (part number 133578) image133578Hollow10mmFerro FlangeStandard
Feedthrough Model SFL-010-WN (part number 133573) image133573Solid10mmFerro FlangeStandard
Feedthrough Model HFL-012-CN (part number 133608) image133608Hollow12mmFerro FlangeStandard
Feedthrough Model SFL-012-NN (part number 133568) image133568Solid12mmFerro FlangeStandard
Feedthrough Model HFL-012-NN (part number 133607) image133607Hollow12mmFerro FlangeStandard
Feedthrough Model HTL-012-CN (part number 133559) image133559Hollow12mmCartridge SealStandard
Feedthrough Model SSL-012-WN (part number 133576) image133576Solid12mmNose (threaded)Standard
Feedthrough Model HTL-012-NN (part number 132761) image132761Hollow12mmCartridge SealStandard
Feedthrough Model HFL-012-MN (part number 133589) image133589Hollow12mmFerro FlangeStandard
Feedthrough Model SFL-012-WN (part number 133574) image133574Solid12mmFerro FlangeStandard
Feedthrough Model HFL-012-WN (part number 133579) image133579Hollow12mmFerro FlangeStandard
Feedthrough Model SNL-012-NN (part number 133599) image133599Solid12mmNut Mounted (threaded body)Standard
Feedthrough Model HFL-020-MN (part number 133590) image133590Hollow20mmFerro FlangeStandard
Feedthrough Model HFL-020-WN (part number 133580) image133580Hollow20mmFerro FlangeStandard
Feedthrough Model SSL-020-NN (part number 133604) image133604Solid20mmNose (threaded)Standard
Feedthrough Model HTL-020-CN (part number 133560) image133560Hollow20mmCartridge SealStandard
Feedthrough Model SFL-020-NN (part number 133569) image133569Solid20mmFerro FlangeStandard
Feedthrough Model HFL-020-CN (part number 133610) image133610Hollow20mmFerro FlangeStandard
Feedthrough Model HFL-020-NN (part number 133609) image133609Hollow20mmFerro FlangeStandard
Feedthrough Model SSL-020-WN (part number 133577) image133577Solid20mmNose (threaded)Standard
Feedthrough Model HTL-020-NN (part number 133600) image133600Hollow20mmCartridge SealStandard
Feedthrough Model SFL-020-WN (part number 133575) image133575Solid20mmFerro FlangeStandard
Feedthrough Model HFL-024-MN (part number 133591) image133591Hollow24mmFerro FlangeStandard
Feedthrough Model HFL-024-WN (part number 133581) image133581Hollow24mmFerro FlangeStandard
Feedthrough Model HTL-024-CN (part number 133433) image133433Hollow24mmCartridge SealStandard
Feedthrough Model HFL-024-CN (part number 133612) image133612Hollow24mmFerro FlangeStandard
Feedthrough Model HFL-024-NN (part number 133611) image133611Hollow24mmFerro FlangeStandard
Feedthrough Model HTL-024-NN (part number 133886) image133886Hollow24mmCartridge SealStandard
Feedthrough Model HFL-026-MN (part number 133592) image133592Hollow26mmFerro FlangeStandard
Feedthrough Model HFL-026-WN (part number 133582) image133582Hollow26mmFerro FlangeStandard
Feedthrough Model HFL-026-CN (part number 133614) image133614Hollow26mmFerro FlangeStandard
Feedthrough Model HFL-026-NN (part number 133613) image133613Hollow26mmFerro FlangeStandard
Feedthrough Model SFL-030-NN (part number 133570) image133570Solid30mmFerro FlangeStandard
Feedthrough Model HTL-032-CN (part number 133561) image133561Hollow32mmCartridge SealStandard
Feedthrough Model HFL-032-MN (part number 133593) image133593Hollow32mmFerro FlangeStandard
Feedthrough Model HFL-032-WN (part number 133583) image133583Hollow32mmFerro FlangeStandard
Feedthrough Model HTL-032-NN (part number 133555) image133555Hollow32mmCartridge SealStandard
Feedthrough Model HFL-032-CN (part number 133616) image133616Hollow32mmFerro FlangeStandard
Feedthrough Model HFL-032-NN (part number 133615) image133615Hollow32mmFerro FlangeStandard
Feedthrough Model HTL-038-NN (part number 133556) image133556Hollow38mmCartridge SealStandard
Feedthrough Model HFL-038-NN (part number 133617) image133617Hollow38mmFerro FlangeStandard
Feedthrough Model HTL-038-CN (part number 133562) image133562Hollow38mmCartridge SealStandard
Feedthrough Model HFL-038-MN (part number 133594) image133594Hollow38mmFerro FlangeStandard
Feedthrough Model HFL-038-WN (part number 133584) image133584Hollow38mmFerro FlangeStandard
Feedthrough Model HFL-038-CN (part number 133618) image133618Hollow38mmFerro FlangeStandard
Feedthrough Model SFL-040-NN (part number 133571) image133571Solid40mmFerro FlangeStandard
Feedthrough Model HTL-040-NN (part number 133557) image133557Hollow40mmCartridge SealStandard
Feedthrough Model HFL-040-CN (part number 133620) image133620Hollow40mmFerro FlangeStandard
Feedthrough Model HFL-040-MN (part number 133595) image133595Hollow40mmFerro FlangeStandard
Feedthrough Model HTL-040-CN (part number 133563) image133563Hollow40mmCartridge SealStandard
Feedthrough Model HFL-040-WN (part number 133585) image133585Hollow40mmFerro FlangeStandard
Feedthrough Model HFL-040-NN (part number 133619) image133619Hollow40mmFerro FlangeStandard
Feedthrough Model HTL-050-NN (part number 120509) image120509Hollow50mmCartridge SealStandard
Feedthrough Model HFL-050-CN (part number 133622) image133622Hollow50mmFerro FlangeStandard
Feedthrough Model HFL-050-NN (part number 133621) image133621Hollow50mmFerro FlangeStandard
Feedthrough Model HTL-050-CN (part number 133564) image133564Hollow50mmCartridge SealStandard
Feedthrough Model HFL-050-MN (part number 133596) image133596Hollow50mmFerro FlangeStandard
Feedthrough Model HFL-050-WN (part number 133586) image133586Hollow50mmFerro FlangeStandard
Feedthrough Model HFL-075-WN (part number 133587) image133587Hollow75mmFerro FlangeStandard
Feedthrough Model HTL-075-NN (part number 121504) image121504Hollow75mmCartridge SealStandard
Feedthrough Model HFL-075-CN (part number 133624) image133624Hollow75mmFerro FlangeStandard
Feedthrough Model HFL-075-NN (part number 133623) image133623Hollow75mmFerro FlangeStandard
Feedthrough Model HTL-075-CN (part number 133565) image133565Hollow75mmCartridge SealStandard
Feedthrough Model HFL-075-MN (part number 133597) image133597Hollow75mmFerro FlangeStandard

Using a Standard Feedthrough as a Template

Our standard designs are often used as a template. While your requirements may almost fit one of our standard parts, our standard part may not be exactly what you need. Not all standard applications look the same, but it’s usually not difficult for us to make modifications to a standard Ferrotec design in order to meet your requirements. Common modifications include shaft length and mounting hole changes.

To modify a standard feedthrough, start by identifying the standard feedthrough that you want to base the design on. Once you have selected the correct part, contact your Ferrotec representative (either directly or using the form provided on the Ordering Information page), and we can work with you to specify the necessary changes.

Click the graphic that best represents the type of feedthrough or seal you’re looking for. A text description of each product will display if you simply roll your mouse over the graphic.

Select Imperial, metric, or both

InchesMetricBoth
Shaft Type
Mount Type
Environment
Temperature
Appearance Model Number Part Number Shaft Type Shaft Dimension Mounting Type Fluid
Feedthrough Model SS-188-SLES (part number 103073) image103073Solid0.1875inMini FlangeStandard
Feedthrough Model SS-188-SLAA (part number 103971) image103971Solid0.1875inNose (threaded)Standard
Feedthrough Model SS-188-SLES (part number 103075) image103075Solid0.1875inMini FlangeStandard
Feedthrough Model SS-188-SLES (part number 103074) image103074Solid0.1875inMini FlangeStandard
Feedthrough Model USS-250-SLBE (part number 150360) image150360Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model USS-250-SLCB (part number 134292) image134292Solid0.25inConFlat FlangeStandard
Feedthrough Model SS-250-SLBE (part number 107519) image107519Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLBD (part number 103236) image103236Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLAB (part number 103978) image103978Solid0.25inNose (threaded)Standard
Feedthrough Model SS-250-SLCA (part number 103915) image103915Solid0.25inConFlat FlangeStandard
Feedthrough Model USS-250-SLCA (part number 134293) image134293Solid0.25inConFlat FlangeStandard
Feedthrough Model USS-250-SLKB (part number 134091) image134091Solid0.25inKF FlangeStandard
Feedthrough Model SS-250-SLBE (part number 103982) image103982Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLBE (part number 103237) image103237Solid0.25inNut Mounted (threaded body)Standard
Feedthrough Model SS-250-SLCB (part number 103532) image103532Solid0.25inConFlat FlangeStandard
Feedthrough Model USS-375-SLCB (part number 134294) image134294Solid0.375inConFlat FlangeStandard
Feedthrough Model SS-375-SLKC  (part number 121062) image121062Solid0.375inKF FlangeStandard
Feedthrough Model SS-375-SLBE (part number 103990) image103990Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model USS-375-SLKB (part number 134090) image134090Solid0.375inKF FlangeStandard
Feedthrough Model SS-375-CFCB (part number 121060) image121060Solid0.375inConFlat FlangeReactive Gas
Feedthrough Model SS-375-SLES (part number 114892) image114892Solid0.375inCustomStandard
Feedthrough Model SS-375-SLBE (part number 132910) image132910Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model SS-375-SLCB (part number 103154) image103154Solid0.375inConFlat FlangeStandard
Feedthrough Model USS-375-SLBE (part number 150359) image150359Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model USS-375-SFKB (part number 134089) image134089Solid0.375inKF FlangeReactive Gas
Feedthrough Model SS-375-SLBF (part number 103991) image103991Solid0.375inNut Mounted (threaded body)Standard
Feedthrough Model SS-375-SLCBW (part number 103912) image103912Solid0.375inConFlat FlangeStandard
Feedthrough Model HS-500-SLFAC (part number 103358) image103358Hollow0.5inFerro FlangeStandard
Feedthrough Model HS-500-SLXSC (part number 132405) image132405Hollow0.5inCartridge SealStandard
Feedthrough Model SS-500-SLCB (part number 103909) image103909Solid0.5inConFlat FlangeStandard
Feedthrough Model SS-500-SLFAW  (part number 103182) image103182Solid0.5inFerro FlangeStandard
Feedthrough Model SS-500-SLFA (part number 103244) image103244Solid0.5inFerro FlangeStandard
Feedthrough Model HS-500-SLFACW (part number 105395) image105395Hollow0.5inFerro FlangeStandard
Feedthrough Model SS-500-SLAE (part number 103191) image103191Solid0.5inNose (threaded)Standard
Feedthrough Model SS-500-SLAEW (part number 103204) image103204Solid0.5inNose (threaded)Standard
Feedthrough Model SS-750-SLFAW (part number 121101) image121101Solid0.75inFerro FlangeStandard
Feedthrough Model SS-750-SLFA (part number 103246) image103246Solid0.75inFerro FlangeStandard
Feedthrough Model HS-750-CFFBWPS  (part number 107426) image107426Hollow0.75inFerro FlangeReactive Gas
Feedthrough Model SS-750-SLAE (part number 103193) image103193Solid0.75inNose (threaded)Standard
Feedthrough Model CM-750-CLFSWC  (part number 132121) image132121Hollow0.75inCompliant MountStandard
Feedthrough Model SS-750-SLAEW (part number 103206) image103206Solid0.75inNose (threaded)Standard
Feedthrough Model HD-750-SLFFW (part number 103904) image103904Heavy Duty0.75inFerro FlangeStandard
Feedthrough Model SS-1000-SLFAW  (part number 121159) image121159Solid1inFerro FlangeStandard
Feedthrough Model HS-1000-SLFBCW (part number 105396) image105396Hollow1inFerro FlangeStandard
Feedthrough Model HS-1000-SLXSC (part number 103319) image103319Hollow1inCartridge SealStandard
Feedthrough Model CM-1000-CLFSWC  (part number 132122) image132122Hollow1inCompliant MountStandard
Feedthrough Model HS-1000-CFFBWP  (part number 107423) image107423Hollow1inFerro FlangeReactive Gas
Feedthrough Model SS-1000-SLFA  (part number 121152) image121152Solid1inFerro FlangeStandard
Feedthrough Model HS-1000-SLFBC (part number 103359) image103359Hollow1inFerro FlangeStandard
Feedthrough Model SS-1000-CFCDW  (part number 121153) image121153Solid1inConFlat FlangeReactive Gas
Feedthrough Model HS-1250-CFFBWPS  (part number 107427) image107427Hollow1.25inFerro FlangeReactive Gas
Feedthrough Model HS-1500-CFFBWP  (part number 107424) image107424Hollow1.5inFerro FlangeReactive Gas
Feedthrough Model HS-1500-SLFBCW (part number 103354) image103354Hollow1.5inFerro FlangeStandard
Feedthrough Model CM-1500-CLFSWC  (part number 132123) image132123Hollow1.5inCompliant MountStandard
Feedthrough Model HS-1500-SLXSC (part number 103320) image103320Hollow1.5inCartridge SealStandard
Feedthrough Model HS-1500-CFFCWPS (part number 107428) image107428Hollow1.5inFerro FlangeReactive Gas
Feedthrough Model HS-1500-SLFBC (part number 103360) image103360Hollow1.5inFerro FlangeStandard
Feedthrough Model HS-1750-CFFBWP  (part number 107425) image107425Hollow1.75inFerro FlangeReactive Gas
Feedthrough Model HS-2000-SLFBCW (part number 103921) image103921Hollow2inFerro FlangeStandard
Feedthrough Model HS-2000-SLXSC (part number 103321) image103321Hollow2inCartridge SealStandard
Feedthrough Model CM-2000-CLFSWC  (part number 122151) image122151Hollow2inCompliant MountStandard
Feedthrough Model HS-2000-SLFBC (part number 103361) image103361Hollow2inFerro FlangeStandard
Feedthrough Model CM-2500-CLFSWC  (part number 132124) image132124Hollow2.5inCompliant MountStandard
Feedthrough Model CM-3000-CLFSWC  (part number 132125) image132125Hollow3inCompliant MountStandard
Feedthrough Model HS-3000-SLFBCW (part number 133760) image133760Hollow3inFerro FlangeStandard
Feedthrough Model HS-3000-SLXSC (part number 133759) image133759Hollow3inCartridge SealStandard
Feedthrough Model HS-3000-SLFEC (part number 133218) image133218Hollow3inFerro FlangeStandard
Feedthrough Model SSL-005-NN (part number 133601) image133601Solid5mmNose (threaded)Standard
Feedthrough Model SNL-005-NN (part number 133598) image133598Solid5mmNut Mounted (threaded body)Standard
Feedthrough Model SFL-005-NN (part number 133566) image133566Solid5mmFerro FlangeStandard
Feedthrough Model SFL-006-NN (part number 133567) image133567Solid6mmFerro FlangeStandard
Feedthrough Model SSL-006-NN (part number 133602) image133602Solid6mmNose (threaded)Standard
Feedthrough Model SFL-006-WN (part number 133572) image133572Solid6mmFerro FlangeStandard
Feedthrough Model SNL-006-NN (part number 133029) image133029Solid6mmNut Mounted (threaded body)Standard
Feedthrough Model SSL-010-NN (part number 133603) image133603Solid10mmNose (threaded)Standard
Feedthrough Model HFL-010-CN (part number 133606) image133606Hollow10mmFerro FlangeStandard
Feedthrough Model HFL-010-NN (part number 133605) image133605Hollow10mmFerro FlangeStandard
Feedthrough Model HTL-010-NN (part number 133554) image133554Hollow10mmCartridge SealStandard
Feedthrough Model SFL-010-NN (part number 131383) image131383Solid10mmFerro FlangeStandard
Feedthrough Model SNL-010-NN (part number 121503) image121503Solid10mmNut Mounted (threaded body)Standard
Feedthrough Model HFL-010-MN (part number 133588) image133588Hollow10mmFerro FlangeStandard
Feedthrough Model HTL-010-CN (part number 133558) image133558Hollow10mmCartridge SealStandard
Feedthrough Model HFL-010-WN (part number 133578) image133578Hollow10mmFerro FlangeStandard
Feedthrough Model SFL-010-WN (part number 133573) image133573Solid10mmFerro FlangeStandard
Feedthrough Model HFL-012-CN (part number 133608) image133608Hollow12mmFerro FlangeStandard
Feedthrough Model SFL-012-NN (part number 133568) image133568Solid12mmFerro FlangeStandard
Feedthrough Model HFL-012-NN (part number 133607) image133607Hollow12mmFerro FlangeStandard
Feedthrough Model HTL-012-CN (part number 133559) image133559Hollow12mmCartridge SealStandard
Feedthrough Model SSL-012-WN (part number 133576) image133576Solid12mmNose (threaded)Standard
Feedthrough Model HTL-012-NN (part number 132761) image132761Hollow12mmCartridge SealStandard
Feedthrough Model HFL-012-MN (part number 133589) image133589Hollow12mmFerro FlangeStandard
Feedthrough Model SFL-012-WN (part number 133574) image133574Solid12mmFerro FlangeStandard
Feedthrough Model HFL-012-WN (part number 133579) image133579Hollow12mmFerro FlangeStandard
Feedthrough Model SNL-012-NN (part number 133599) image133599Solid12mmNut Mounted (threaded body)Standard
Feedthrough Model HFL-020-MN (part number 133590) image133590Hollow20mmFerro FlangeStandard
Feedthrough Model HFL-020-WN (part number 133580) image133580Hollow20mmFerro FlangeStandard
Feedthrough Model SSL-020-NN (part number 133604) image133604Solid20mmNose (threaded)Standard
Feedthrough Model HTL-020-CN (part number 133560) image133560Hollow20mmCartridge SealStandard
Feedthrough Model SFL-020-NN (part number 133569) image133569Solid20mmFerro FlangeStandard
Feedthrough Model HFL-020-CN (part number 133610) image133610Hollow20mmFerro FlangeStandard
Feedthrough Model HFL-020-NN (part number 133609) image133609Hollow20mmFerro FlangeStandard
Feedthrough Model SSL-020-WN (part number 133577) image133577Solid20mmNose (threaded)Standard
Feedthrough Model HTL-020-NN (part number 133600) image133600Hollow20mmCartridge SealStandard
Feedthrough Model SFL-020-WN (part number 133575) image133575Solid20mmFerro FlangeStandard
Feedthrough Model HFL-024-MN (part number 133591) image133591Hollow24mmFerro FlangeStandard
Feedthrough Model HFL-024-WN (part number 133581) image133581Hollow24mmFerro FlangeStandard
Feedthrough Model HTL-024-CN (part number 133433) image133433Hollow24mmCartridge SealStandard
Feedthrough Model HFL-024-CN (part number 133612) image133612Hollow24mmFerro FlangeStandard
Feedthrough Model HFL-024-NN (part number 133611) image133611Hollow24mmFerro FlangeStandard
Feedthrough Model HTL-024-NN (part number 133886) image133886Hollow24mmCartridge SealStandard
Feedthrough Model HFL-026-MN (part number 133592) image133592Hollow26mmFerro FlangeStandard
Feedthrough Model HFL-026-WN (part number 133582) image133582Hollow26mmFerro FlangeStandard
Feedthrough Model HFL-026-CN (part number 133614) image133614Hollow26mmFerro FlangeStandard
Feedthrough Model HFL-026-NN (part number 133613) image133613Hollow26mmFerro FlangeStandard
Feedthrough Model SFL-030-NN (part number 133570) image133570Solid30mmFerro FlangeStandard
Feedthrough Model HTL-032-CN (part number 133561) image133561Hollow32mmCartridge SealStandard
Feedthrough Model HFL-032-MN (part number 133593) image133593Hollow32mmFerro FlangeStandard
Feedthrough Model HFL-032-WN (part number 133583) image133583Hollow32mmFerro FlangeStandard
Feedthrough Model HTL-032-NN (part number 133555) image133555Hollow32mmCartridge SealStandard
Feedthrough Model HFL-032-CN (part number 133616) image133616Hollow32mmFerro FlangeStandard
Feedthrough Model HFL-032-NN (part number 133615) image133615Hollow32mmFerro FlangeStandard
Feedthrough Model HTL-038-NN (part number 133556) image133556Hollow38mmCartridge SealStandard
Feedthrough Model HFL-038-NN (part number 133617) image133617Hollow38mmFerro FlangeStandard
Feedthrough Model HTL-038-CN (part number 133562) image133562Hollow38mmCartridge SealStandard
Feedthrough Model HFL-038-MN (part number 133594) image133594Hollow38mmFerro FlangeStandard
Feedthrough Model HFL-038-WN (part number 133584) image133584Hollow38mmFerro FlangeStandard
Feedthrough Model HFL-038-CN (part number 133618) image133618Hollow38mmFerro FlangeStandard
Feedthrough Model SFL-040-NN (part number 133571) image133571Solid40mmFerro FlangeStandard
Feedthrough Model HTL-040-NN (part number 133557) image133557Hollow40mmCartridge SealStandard
Feedthrough Model HFL-040-CN (part number 133620) image133620Hollow40mmFerro FlangeStandard
Feedthrough Model HFL-040-MN (part number 133595) image133595Hollow40mmFerro FlangeStandard
Feedthrough Model HTL-040-CN (part number 133563) image133563Hollow40mmCartridge SealStandard
Feedthrough Model HFL-040-WN (part number 133585) image133585Hollow40mmFerro FlangeStandard
Feedthrough Model HFL-040-NN (part number 133619) image133619Hollow40mmFerro FlangeStandard
Feedthrough Model HTL-050-NN (part number 120509) image120509Hollow50mmCartridge SealStandard
Feedthrough Model HFL-050-CN (part number 133622) image133622Hollow50mmFerro FlangeStandard
Feedthrough Model HFL-050-NN (part number 133621) image133621Hollow50mmFerro FlangeStandard
Feedthrough Model HTL-050-CN (part number 133564) image133564Hollow50mmCartridge SealStandard
Feedthrough Model HFL-050-MN (part number 133596) image133596Hollow50mmFerro FlangeStandard
Feedthrough Model HFL-050-WN (part number 133586) image133586Hollow50mmFerro FlangeStandard
Feedthrough Model HFL-075-WN (part number 133587) image133587Hollow75mmFerro FlangeStandard
Feedthrough Model HTL-075-NN (part number 121504) image121504Hollow75mmCartridge SealStandard
Feedthrough Model HFL-075-CN (part number 133624) image133624Hollow75mmFerro FlangeStandard
Feedthrough Model HFL-075-NN (part number 133623) image133623Hollow75mmFerro FlangeStandard
Feedthrough Model HTL-075-CN (part number 133565) image133565Hollow75mmCartridge SealStandard
Feedthrough Model HFL-075-MN (part number 133597) image133597Hollow75mmFerro FlangeStandard

Retrofit and Upgrade Solutions for Vacuum Manufacturing Systems

As the industry leader in rotary seals, Ferrotec understands the requirements of your performance application. Although some equipment may not have been originally designed using a Ferrofluidic seal, a solution from Ferrotec can eliminate operational hassles and improve system performance.

Ferrotec offers retrofit and upgrade solutions for many vacuum manufacturing systems. If you don’t see your specific system listed, contact your Ferrotec representative and find out about the solution that is right for you.

Popular Examples

Varian 3000-series Sputtering System

Non-contacting Ferrofluidic seals improve uptime and extend the tool’s productive life. Smooth mechanical operation eliminates binding and drag, and reduced particles and contaminants improve product quality.

Oerlikon / Unaxis Z 660, Zh 620, Vanguard, Emerald and Corona Sputtering Tool

Ferrotec’s engineered solution upgrades the rotary-lift subassembly while providing a complete refurbishment. Eliminate electrical arcing, improve plasma stability and process repeatability, and extend tool operation and uptime.

Tokyo Electron Alpha-8, -8S and -8SE CVD Furnace

Hermetic Ferrofluidic seals eliminate environmental leaks and contamination. Ferrotec’s high performance retrofit provides long life and high reliability.

Perkin Elmer 4400-series Sputtering System

Ferrotec offers several individual feedthroughs as well as full upgrade and refurbishment of the rotary-lift subassembly. The original design’s elastomer seals cause binding and leaks and lead to unplanned downtime and maintenance. Replace the old parts with proven Ferrofluidic seals and an easily serviceable commercial water union.

We Specialize in Engineering Solutions

At Ferrotec, we’re committed to providing solutions that make your products work better, more precisely, and more reliably. When the challenges of your application exceed the specifications of our standard products, we can work with you to engineer a customized solution specifically suited to your unique application challenges.

From simple modifications of our standard products to custom-engineered precision-motion assemblies for new applications, we specialize in engineering solutions.

Many feedthrough parameters can be modified or customized to ensure that the final product matches your application. Some common customized features include:

Size and Shape

  • Small diameter or short length designs
  • Large diameter or long shaft designs
  • Fit within existing envelopes

Motion

  • Multi-axial rotation
  • Rotary and linear motion
  • Integrated motor, gear drive, or drive coupling

Mounting, Seal and Housing Configuration

  • Alternative materials
  • Surface finishes and coatings
  • Customized flanges
  • Location of sealing stages (on the stator or rotor)

Performance Features

  • Ferrofluid type
  • External magnetic field
  • Bearing type, material, and position

Shaft Features and Performance

  • Shaft strength
  • Shaft termination features
  • Shaft material
  • Material combinations
  • Coatings, surface finishes

Performance Features

  • Ferrofluid type
  • External magnetic field
  • Bearing type, material, and position

Subsystem Integration Design and Assembly

  • End effectors and components
  • Motor, in-line drive, and Ferrodrive integration
  • Advanced features to integrate with complex tools

Custom Design Examples

Many feedthrough parameters can be modified or customized to ensure that the final product matches your application. Some common customized features include:

With over thirty years of experience developing and manufacturing precision sealing solutions for our customers, Ferrotec has developed custom solutions for many of the world’s most demanding applications. Here are some common examples of custom engineered feedthroughs and sealing sub-systems that we have developed.

Compact Designs

Ferrotec offers extremely compact seals with small seal envelopes. These are sometimes the only option in the case of retrofits where there is limited axial or radial space available. In new designs they are often beneficial to the overall system layout.

Typical applications that Ferrotec’s compact designs are used for include:

  • FLIR devices
  • Retrofit feedthroughs
  • Rinser-dryers

High-speed, Large Diameter Hollow Shaft Feedthroughs

High speed, large diameter hollow shaft feedthroughs are ideal for optical coating applications, e.g. fiber optic filter manufacturing. These feedthroughs are configured with a double Ferrofluidic seal to enable static access to the rear of the seal. Drive is supplied via a toothed belt through the side of the housing or an integral brushless motor within the feedthrough housing. The product can then be accurately observed or measured through the large diameter hollow shaft without the difficulties associated with a rotating window. Seals with an 8″ internal diameter can be used at speeds up to 1,000 rpm.

Typical applications of high-speed, large diameter hollow shaft feedthroughs include:

  • Optical coating applications
  • 300 mm wafer rotation mechanisms

Multi-axial Feedthroughs

Ferrotec offers multi-axial feedthroughs for wafer handling applications. These offer extremely high repeatability with zero backlash. Linear motion is often incorporated as is cantilevered bearing configuration to optimize for UHV (Ultra High Vacuum) applications. Unlike magnetic couplings, the feedthroughs employ a continuous shaft per axis to transmit torque to the load, so torsional stiffness is maximized, allowing for the highest torque transmission of any UHV wafer-handling rotary seal technology.

Typical applications of multi-axial feedthroughs include:

  • Wafer handling
  • CVD wafer rotation with stationary inner shaft

Rotary-linear Feedthroughs

Rotary linear feedthroughs integrate a Ferrofluidic rotary seal with an edge-welded metal bellows linear seal. They use pre-loaded angular contact rotary bearings and sleeve or ball-type linear bearings. Such feedthroughs are ideal for wafer handling and aligning applications where precise indexing and translation are involved.

Typical applications of rotary-linear feedthroughs include:

  • Wafer handling and alignment with Z-motion

High-precision Spindle Design

Ferrofluidic spindles can be engineered to rotate with as little as 0.0001″ (0.005 mm) of run-out. These products are ideal for high precision wafer handling/aligning applications and wafer/substrate rotation applications where wobble requirements are very stringent. Axial, radial and torsional spindle stiffness are achieved by custom engineering the bearing and shaft designs.

Typical applications that Ferrotec’s high-precision spindle designs are used for include:

  • Wafer handling
  • Ion implantation

In-line Drive Motorized Feedthroughs

An in-line motorized feedthrough is compact in comparison to an offset or shaft-coupled drive. Ferrofluidic in-line motorized feedthroughs feature a brushless servomotor and matching amplifier with power supply and sinusoidal commutation. Application appropriate feedback devices and command loops are incorporated. As the feedthrough has the motor fully integrated around the shaft rather than coupled to it, it provides optimum drive-to-load torque efficiency over the life of the product. Direct drive feedthroughs are available with either solid or hollow shafts.

Typical applications that in-line drive motorized feedthroughs are used for include:

  • Any application where a motor is used, particularly where servo control is necessary

Rotary Gas Unions

Ferrofluidic rotary gas unions offer manufacturers of Chemical Vapor Deposition (CVD) and other deposition systems an efficient and flexible method of introducing gases into a process. A static gas feed runs into the rotating shaft which supports the wafer. This ensures that the gas outlet is in the center of the wafer, resulting in uniform coating characteristics.

More information on Rotary Gas Unions can be found in the Gas and Vacuum Unions section of the Ferrotec web site. Read More »

Reactive Gas Seal

Reactive gas seals for applications such as MOCVD use an inert fluorocarbon based fluid. They feature a cantilevered seal design to protect the bearings from process gases. Special materials are used in the seal construction. Inert gas purges or protective plating can also be added to prevent corrosive attack of seal components.

More information on Reactive Gas Seals can be found in the Gas and Vacuum Unions section of the Ferrotec web site. Read More »

Retrofit Feedthroughs

Ferrotec offers a range of retrofit feedthroughs that we’ve already designed for many vacuum systems supplied by leading semiconductor OEMs. If your part isn’t in our existing library of retrofit designs, we can design and optimize a retrofit seal to replace your current part with a Ferrofluidic seal.

More information about Ferrotec’s Retrofit Feedthroughs can be found on the Retrofit Seals page of the Ferrotec web site. Read More »

 

We will Work With You to Modify Standard Ferrotec Designs

Our standard feedthrough designs are often used as a custom design template. While your requirements may almost fit one of our standard parts, our standard part may not be exactly what you need. Not all standard applications look the same, but it’s usually not difficult for us to make modifications to a standard Ferrotec design in order to meet your requirements. Common modifications include shaft length and mounting hole changes.

To modify a standard feedthrough, start by identifying the standard feedthrough that you want to base the design on. Once you have selected the correct part, contact your Ferrotec representative (either directly or using the form provided on the Ordering Information page), and we can work with you to specify the necessary changes.

If you have questions about pricing and availability, need more information about Ferrotec’s rotary feedthroughs, or if you have other Ferrofluidic seal requirements, you can submit your request using the form below or contact your Ferrotec representative directly »

Special Orders, Modifications, and Customized Solutions for Unique Applications

  • Section 1: Contact Information

    * Indicates a required field

  • Your Request

We Can Help Streamline Your Components

Discover the benefits of having Ferrotec become your engineering partner. With our extensive experience in vacuum manufacturing, sealing and robotic systems, Ferrotec can help you integrate your components into streamlined sub-assemblies that deliver measurable product benefits.

Reduce your design & development time

Partnering with Ferrotec enables your internal engineering staff to focus on the core development of your product.

Reduce your costs

From motorized integrated drive-throughs to closely matching component selections, when we are able to look at your entire engineering challenge, we can engineer an integrated product that performs better.

From concept to completion, Ferrotec offers the engineering, design and manufacturing capabilities to ensure that your sealing sub-system delivers world-class performance. Ferrotec was the first company to manufacture magnetic liquid seals and has spent the last 30 years further developing and advancing the technology. With 30 years’ proven track record of supplying seals to the semiconductor, optical, aero-space, medical, defense, lamp manufacturing and other industries you can be sure that our expertise is second to none. Whether you need us to manufacture to an existing sub-system design, or need a new state-of-the-art Ferrotec custom design, Ferrotec is your ideal partner for expertly manufactured and tested sealing sub-assemblies, shipped dock-to-stock to meet your production needs.

We apply the same stringent manufacturing and control processes developed for our Ferrofluidic® seals to all our sub-systems. Our design engineers work closely with you to develop a thorough product specification.

Manufacturing engineers develop detailed procedures to ensure that all specifications are met and a complete manufacturing control document is produced. Each part in the assembly is carefully inspected using the most advanced quality practices and thoroughly cleaned before assembly in our cleanroom. Highly skilled manufacturing technicians assemble your sub-system with care and precision. Finally, completed assemblies are thoroughly inspected and tested to ensure that all operational and dimensional specifications are correct before shipping to your manufacturing floor.

Ferrotec’s Sub-system Manufacturing Experience

Ferrotec has experience manufacturing a broad range of subsystems for semiconductor, optical, aerospace, medical, defense, lamp manufacturing and other applications. Some examples include:

Servo-controlled rotary feedthroughs

A custom servo-controlled rotary feedthrough offers precise speed and position control by combining servo control and high resolution encoder feedback with a non-wearing high vacuum Ferrofluidic rotary feedthrough. Speed accuracy of ±0.1% is combined with smooth rotation.

Servo-controlled rotary linear coaxial Ferrofluidic feedthroughs with precision position control

These sub-systems combine non-wearing Ferrofluidic rotary sealing with smooth linear actuation. Servo control with high resolution encoder feedback offers precise speed, positioning and indexing control. It also offers high load capacity and torsional stiffness.

Wafer handling arm

The wafer handling arm sub-assembly is integrated into a cluster tool where it positions 200mm and 300mm wafers, picking and placing them at different locations for processing. The sub-assembly features a Ferrofluidic coaxial feedthrough powered by a brushed DC motor and a harmonic drive, directly integrated with the precision in-vacuum components and other hardware demanded by the system.

Rotary Linear Wafer Positioner

Ferrotec built this 300mm rotary linear wafer positioning assembly to a customer’s existing design and specification. The sub-system picks up, rotates and lowers the wafers, providing motion in the z-axis as well as rotary motion. Initially Ferrotec worked closely with the customer to develop a Ferrofluidic seal for this application. Ferrotec later value engineered and manufactured the complete sub-system, and now takes care of part procurement, supply chain management, building and testing the system.

 

Ferrofluidic Seal Repairs, Upgrades, and Exchange Services

Ferrotec can repair, upgrade or exchange your existing seal with a premium Ferrofluidic product using Ferrotec’s ferrofluid that is optimized for Ferrofluidic seals.

Do You Need More Information?

Find out more about Ferrotec’s Ferrofluidic Seals capabilities

Contact Sales